Editing Vacuum pump (section)

=== Other types ===
==== Regenerative pump ====
{{main|Pump#Regenerative turbine pumps}}
Regenerative pumps utilize vortex behavior of the fluid (air). The construction is based on hybrid concept of [[centrifugal pump]] and turbopump. Usually it consists of several sets of perpendicular teeth on the rotor circulating air molecules inside stationary hollow grooves like multistage centrifugal pump.  They can reach to 1×10<sup>−5</sup> mbar (0.001 Pa)(when combining with Holweck pump) and directly exhaust to atmospheric pressure. Examples of such pumps are Edwards EPX <ref>{{cite web|url=http://www.edwardsvacuum.com/Products/List.aspx?r=32|title=EPX on-tool High Vacuum Pumps|access-date=2013-01-16|archive-date=2013-02-20|archive-url=https://web.archive.org/web/20130220122826/http://edwardsvacuum.com/Products/List.aspx?r=32|url-status=dead}}</ref> (technical paper <ref>{{cite web|url=http://edwardsvacuum.com/uploadedFiles/Resource/Technical_Articles/Toward+the+Single+Pumping+Solution.pdf|archive-url=https://web.archive.org/web/20130915114706/http://edwardsvacuum.com/uploadedFiles/Resource/Technical_Articles/Toward+the+Single+Pumping+Solution.pdf|title=Edwards - Edwards Vacuum|url-status=dead|archive-date=15 September 2013|date=15 September 2013}}</ref>) and Pfeiffer OnTool™ Booster 150.<ref>{{cite web |author=Pfeiffer Vacuum |title=Side Channel Pump, Vacuum pump for High-vacuum - Pfeiffer Vacuum |url=http://www.pfeiffer-vacuum.com/products/side-channel-pumps/container.action |url-status= |archive-url=https://web.archive.org/web/20141007050305/http://www.pfeiffer-vacuum.com/products/side-channel-pumps/container.action |archive-date=7 October 2014 |access-date=30 September 2022 |website=Pfeiffer Vacuum}}</ref> It is sometimes referred as side channel pump. Due to high pumping rate from atmosphere to high vacuum and less contamination since bearing can be installed at exhaust side, this type of pumps are used in load lock in semiconductor manufacturing processes.

This type of pump suffers from high power consumption(~1&nbsp;kW) compared to turbomolecular pump (<100W) at low pressure since most power is consumed to back atmospheric pressure. This can be reduced by nearly 10 times by backing with a small pump.<ref>{{cite journal|journal= Vacuum |volume= 85 |issue= 12 |year= 2011 | pages= 1174–1177 |title= High vacuum side channel pump working against atmosphere |first1= A. |last1= Shirinov |first2= S. |last2= Oberbeck | doi=10.1016/j.vacuum.2010.12.018|bibcode= 2011Vacuu..85.1174S }}</ref>

==== More examples ====
Additional types of pump include the:

*Venturi vacuum pump ([[Aspirator (pump)|aspirator]]) (10 to 30 kPa)
*[[Injector|Steam ejector]] (vacuum depends on the number of stages, but can be very low)