Editing Electron microscope (section)

=== Scanning transmission electron microscope (STEM) ===
{{Main|Scanning transmission electron microscopy}}
A STEM combines features of both a TEM and a SEM by rastering a focused incident probe across a specimen. Many types of imaging are common to both TEM and STEM, but some such as T [[annular dark-field imaging]] and other analytical techniques are much easier to perform with higher spatial resolutions in a STEM instrument. One drawback is that image data is acquired in serial rather than in parallel fashion.<ref name=":0">{{cite book |last=Kohl |first=Helmut |title=Transmission Electron Microscopy |last2=Reimer |first2=Ludwig |date=2008 |publisher=Springer |isbn=978-0-387-40093-8 |series=Springer Series in Optical Sciences |volume=36 |pages= |chapter=Elements of a Transmission Electron Microscope |doi=10.1007/978-0-387-40093-8_4}}</ref>{{Rp|pages=75–138}}