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== 20th century == * 1905 β [[Carl von Linde]] obtains pure liquid [[oxygen]] and [[nitrogen]]. * 1906 β [[Willis Carrier]] patents the basis for modern [[air conditioning]]. * 1908 β [[Heike Kamerlingh Onnes]] liquifies [[helium]]. * 1911 β Heike Kamerlingh Onnes discloses his research on metallic low-temperature phenomenon characterised by no electrical resistance, calling it [[superconductivity]]. * 1915 β [[Wolfgang Gaede]] β the [[Diffusion pump]] * 1920 β Edmund Copeland and Harry Edwards use [[iso-butane]] in small refrigerators. * 1922 β [[Baltzar von Platen (inventor)|Baltzar von Platen]] and [[Carl Munters]] invent the 3 fluids absorption chiller, exclusively driven by heat. * 1924 β [[Fernand Holweck]] β the [[Holweck pump]] * 1926 β [[Albert Einstein]] and [[LeΓ³ SzilΓ‘rd]] invent the [[Einstein refrigerator]]. * 1926 β [[Willem Hendrik Keesom]] solidifies helium. * 1926 β [[General Electric Company]] introduced the first hermetic compressor refrigerator * 1929 β David Forbes Keith of Toronto, Ontario, Canada received a patent for the [[Icy Ball]] which helped hundreds of thousands of families through the [[Dirty Thirties]]. * 1933 β [[William Giauque]] and others β Adiabatic demagnetization refrigeration * 1937 β [[Pyotr Leonidovich Kapitsa]], [[John F. Allen (physicist)|John F. Allen]], and [[Don Misener]] discover [[superfluidity]] using helium-4 at 2.2 [[Kelvin|K]] * 1937 β [[Frans Michel Penning]] invents a type of [[cold cathode]] vacuum gauge known as [[Penning gauge]] * 1944 β [[Manne Siegbahn]], the [[Turbomolecular pump|Siegbahn pump]] * 1949 β S.G. Sydoriak, E.R. Grilly, E.F. Hammel, first measurements on pure 3He in the 1 K range * 1950 β Invention of the so-called Gifford-McMahon cooler by K.W. Taconis (patent US2,567,454) * 1951 β [[Heinz London]] invents the principle of the [[dilution refrigerator]] * 1955 β Willi Becker <!-- April 28, 2011 β Removed link to politician; no article yet for this pump engineer. --> [[turbomolecular pump]] concept<ref>[http://www.avs.org/pdf/timelineD.pdf Vacuum Science & Technology Timeline]</ref> * 1956 β G.K. Walters, W.M. Fairbank, discovery of phase separation in 3He-4He mixtures * 1957 β Lewis D. Hall, Robert L. Jepsen and John C. Helmer [[Ion pump (physics)|ion pump]] based on Penning discharge * 1959 β [[Kleemenko cycle]] * 1960 β Reinvention of the Gifford-McMahon cooler by H.O. McMahon and W.E. Gifford * 1965 β D.O. Edwards, and others, discovery of finite solubility of 3He in 4He at 0K * 1965 β P. Das, R. de Bruyn Ouboter, K.W. Taconis, one-shot dilution refrigerator<ref>{{Cite journal | doi = 10.1016/j.cryogenics.2021.103390| issn=0011-2275 | title = Development of Dilution refrigerators β A review | journal = Cryogenics| volume = 121| year = 2022| last1 = Zu | first1 = H.| last2 = Dai | first2 = W.| last3 = de Waele | first3 = A.T.A.M.| s2cid=244005391 }}</ref> * 1966 β H.E. Hall, P.J. Ford, K. Thomson, continuous dilution refrigerator * 1972 β [[David Lee (physicist)|David Lee]], [[Robert Coleman Richardson]] and [[Douglas Osheroff]] discover superfluidity in helium-3 at 0.002 K. * 1973 β [[Linear compressor]] * 1978 β [[Laser cooling]] demonstrated in the groups of Wineland and Dehmelt. * 1983 β Orifice-type [[pulse tube refrigerator]] invented by Mikulin, Tarasov, and Shkrebyonock * 1986 β [[Karl Alexander MΓΌller]] and [[J. Georg Bednorz]] discover [[high-temperature superconductivity]] * 1995 β [[Eric Cornell]] and [[Carl Wieman]] create the first<ref>{{cite web|title=New State of Matter Seen Near Absolute Zero|url=http://physics.nist.gov/News/Update/950724.html|publisher=NIST|url-status=dead|archive-url=https://web.archive.org/web/20100601175245/http://physics.nist.gov/News/Update/950724.html|archive-date=2010-06-01}}</ref> [[BoseβEinstein condensate]], using a dilute gas of [[Rubidium-87]] cooled to 170 nK. They won the Nobel Prize for Physics in 2001 for BEC. * 1999 β D.J. Cousins and others, dilution refrigerator reaching 1.75 mK * 1999 β The current world record lowest temperature was set at 100 picokelvins (pK), or 0.000 000 000 1 of a kelvin, by cooling the nuclear spins in a piece of [[rhodium]] metal.<ref>{{cite web|url = http://ltl.tkk.fi/wiki/LTL/World_record_in_low_temperatures|title = World record in low temperatures|access-date =2009-05-05| archive-url= https://web.archive.org/web/20090618075820/http://ltl.tkk.fi/wiki/LTL/World_record_in_low_temperatures| archive-date=2009-06-18| url-status= live}}</ref>
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