Editing MEMS (section)

== Applications ==
[[File:DLP CINEMA. A Texas Instruments Technology - Photo Philippe Binant.jpg|thumb|A [[Texas Instruments]] DMD chip for cinema projection]]
[[File:Gold stripe testing with MEMS.webm|thumb|Measuring mechanical properties of a gold stripe (width ~1&nbsp;μm) using MEMS inside a [[transmission electron microscope]]<ref>{{cite journal|vauthors=Hosseinian E, Pierron ON|date=2013|title=Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films|journal=[[Nanoscale (journal)|Nanoscale]]|volume=5|issue=24|pages=12532–41|doi=10.1039/C3NR04035F|pmid=24173603|bibcode=2013Nanos...512532H|s2cid=17970529}}</ref>]]
Some common commercial applications of MEMS include:
* [[Inkjet printer]]s, which use [[piezoelectric]]s or thermal bubble ejection to deposit ink on paper.
* [[Accelerometer]]s in modern cars for a large number of purposes including [[airbag]] deployment and [[electronic stability control]].
* [[Inertial measurement unit]]s (IMUs): 
** MEMS [[accelerometer]]s.
** [[MEMS gyroscope]]s in remote controlled, or autonomous, helicopters, planes and multirotors (also known as drones), used for automatically sensing and balancing flying characteristics of roll, pitch and yaw.
** [[MEMS magnetic field sensor]] ([[magnetometer]]) may also be incorporated in such devices to provide directional heading.
** MEMS [[inertial navigation system]]s (INSs) of modern cars, airplanes, submarines and other vehicles to detect [[yaw, pitch, and roll]]; for example, the [[autopilot]] of an airplane.<ref>{{cite book|url=https://books.google.com/books?id=WgFPvZyApd0C&pg=PA111|title=MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness|vauthors=Acar C, Shkel AM|publisher=[[Springer Science+Business Media|Springer]]|year=2008|isbn=978-0-387-09536-3|pages=111}}</ref>
* Accelerometers in consumer electronics devices such as game controllers (Nintendo [[Wii]]), personal media players / cell phones (virtually all smartphones, various HTC PDA models),<ref>{{Cite news|url=https://www.eetimes.com/document.asp?doc_id=1305409|title=There's more to MEMS than meets the iPhone|last=Johnson RC|date=2007|work=[[EE Times]]|access-date=14 Jun 2019}}</ref> [[augmented reality]] (AR) and [[virtual reality]] (VR) devices, and a number of digital cameras (various [[Canon Digital IXUS]] models). Also used in PCs to park the hard disk head when free-fall is detected, to prevent damage and data loss.
* MEMS speakers for [[Headphones]]
* [[MEMS barometer]]s.
* MEMS microphones in portable devices, e.g., mobile phones, head sets and laptops. The market for smart microphones includes smartphones, wearable devices, smart home and automotive applications.<ref>{{Cite news|url=https://www.eenewsanalog.com/news/smart-mems-microphones-market-emerges|title=Smart MEMS microphones market emerges|last=Clarke P|date=2016|work=[[EE Times|EE News Analog]]|access-date=14 Jun 2019}}</ref>
* Precision temperature-compensated resonators in [[real-time clock]]s.<ref>{{cite web|url=https://datasheets.maximintegrated.com/en/ds/DS3231M.pdf|title=DS3231m RTC|date=2015|website=DS3231m RTC Datasheet|publisher=Maxim Inc.|access-date=26 Mar 2019}}</ref>
* Silicon [[pressure sensor]]s e.g., car [[tire]] pressure [[sensor]]s, and disposable [[blood pressure]] [[sensor]]s.
* [[Display device|Displays]] e.g., the [[digital micromirror device]] (DMD) chip in a projector based on [[Digital Light Processing|DLP]] technology, which has a surface with several hundred thousand micromirrors or single micro-scanning-mirrors also called [[microscanner]]s. The MEMS mirrors can also be used in conjunction with laser scanning to project an image.<ref>{{Cite web |title=Implementing Laser Scanned-MEMS Projection in Automotive Head-Up Displays |url=https://www.renesas.com/us/en/document/whp/implementing-laser-scanned-mems-projection-automotive-head-displays |publisher=Renesas Electronics Corporation |format=PDF}}</ref><ref>{{Cite web |title=Maradin - Projecting the Future |url=https://www.maradin.co.il/ |access-date=2024-06-29 |website=Maradin Ltd. |language=en-US}}</ref>
* [[Optical switch]]ing technology, which is used for switching technology and alignment for [[data communications]].
* RF switches and relays.<ref>{{cite web | url=https://www.electronicdesign.com/technologies/power/article/21808737/mems-relays-push-power-limits | title=MEMS Relays Push Power Limits | date=22 October 2019 }}</ref><ref>{{cite book | chapter-url=https://link.springer.com/referenceworkentry/10.1007/978-981-10-5945-2_34 | doi=10.1007/978-981-10-5945-2_34 | chapter=RF MEMS Switch | title=Micro Electro Mechanical Systems | series=Micro/Nano Technologies | date=2018 | last1=Wang | first1=Li-Feng | last2=Huang | first2=Qing-An | last3=Han | first3=Lei | pages=1039–76 | isbn=978-981-10-5944-5 }}</ref>
* [[Bio-MEMS]] applications in medical and health related technologies including [[lab-on-a-chip]] (taking advantage of [[microfluidics]] and [[micropump]]s), [[biosensor]]s, [[Chemoreceptor|chemosensors]] as well as embedded components of medical devices e.g. stents.<ref>{{cite journal|vauthors=Louizos LA, Athanasopoulos PG, Varty K|date=2012|title=Microelectromechanical Systems and Nanotechnology. A Platform for the Next Stent Technological Era|journal=[[Vascular and Endovascular Surgery|Vasc. Endovasc. Surg.]]|volume=46|issue=8|pages=605–9|doi=10.1177/1538574412462637|pmid=23047818|s2cid=27563384}}</ref>
* [[Interferometric modulator display]] (IMOD) applications in consumer electronics (primarily displays for mobile devices), used to create interferometric modulation − reflective display technology as found in mirasol displays.
* Fluid acceleration, such as for micro-cooling.
* Micro-scale [[energy harvesting]] including piezoelectric,<ref>{{cite journal|vauthors=Hajati A, Kim SG|date=2011|title=Ultra-wide bandwidth piezoelectric energy harvesting|journal=[[Applied Physics Letters|Appl. Phys. Lett.]]|volume=99|issue=8|pages=083105|doi=10.1063/1.3629551|bibcode=2011ApPhL..99h3105H|hdl=1721.1/75264|s2cid=85547220 |hdl-access=free}}</ref> electrostatic and electromagnetic micro harvesters.
* Micromachined [[ultrasound transducer]]s.<ref>{{cite journal|vauthors=Hajati A|date=2012|title=Three-dimensional micro electromechanical system piezoelectric ultrasound transducer|journal=[[Applied Physics Letters|Appl. Phys. Lett.]]|volume=101|issue=25|pages=253101|doi=10.1063/1.4772469|bibcode=2012ApPhL.101y3101H|s2cid=46718269}}</ref><ref>{{cite journal|vauthors=Hajati A|date=2013|title=Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes|journal=[[Applied Physics Letters|Appl. Phys. Lett.]]|volume=103|issue=20|pages=202906|doi=10.1063/1.4831988|bibcode=2013ApPhL.103t2906H}}</ref>
* MEMS-based loudspeakers focusing on applications such as in-ear headphones and hearing aids.
* [[Microelectromechanical system oscillator|MEMS oscillators]].
* MEMS-based [[scanning probe microscopy|scanning probe microscopes]] including [[Atomic Force Microscopy|atomic force microscopes]].
* [[Lidar|LiDAR]] (light detection and ranging).