Editing Scanning electron microscope (section)

==History==
An account of the early history of scanning electron microscopy has been presented by McMullan.<ref>{{cite journal|author=McMullan, D. |doi=10.1002/sca.4950170309|url=http://www-g.eng.cam.ac.uk/125/achievements/mcmullan/mcm.htm|title=Scanning electron microscopy 1928–1965|year=2006|journal=Scanning|volume=17|issue=3|pages=175–185|pmc=2496789}}</ref><ref>{{cite journal|author=McMullan, D.|year=1988|title=Von Ardenne and the scanning electron microscope|journal= Proc Roy Microsc Soc |volume=23|pages= 283–288}}</ref> Although [[Max Knoll]] produced a photo with a 50&nbsp;mm object-field-width showing channeling contrast by the use of an electron beam scanner,<ref name="Knoll-1935">{{cite journal |last=Knoll |first=Max|year=1935 |title=Aufladepotentiel und Sekundäremission elektronenbestrahlter Körper |journal=Zeitschrift für Technische Physik |volume=16|pages=467–475}}</ref> it was [[Manfred von Ardenne]] who in 1937 invented<ref name="von Ardenne">{{Cite patent|country=GB|number=511204|title=Improvements in electron microscopes|pubdate=1939-08-15|inventor1-last=von Ardenne|inventor1-first=Manfred}}</ref> a microscope with high [[Optical resolution|resolution]] by scanning a very small raster with a demagnified and finely focused electron beam. In the same year, Cecil E. Hall also completed the construction of the first emission microscope in North America, just two years after being tasked by his supervisor, E. F. Burton at the University of Toronto.<ref>{{Cite web| title=History of Electron Microscopy in North America | author=Robert M. Fisher | url=https://www.cambridge.org/core/services/aop-cambridge-core/content/view/07CA329CE1E1FF29442C48A64BC16C2F/S1551929500066402a.pdf/history-of-electron-microscopy-in-north-america.pdf | archive-url=https://web.archive.org/web/20231115204444/https://www.cambridge.org/core/services/aop-cambridge-core/content/view/07CA329CE1E1FF29442C48A64BC16C2F/S1551929500066402a.pdf/history-of-electron-microscopy-in-north-america.pdf | archive-date=2023-11-15}}</ref> Ardenne applied scanning of the electron beam in an attempt to surpass the resolution of the [[transmission electron microscope]] (TEM), as well as to mitigate substantial problems with [[chromatic aberration]] inherent to real imaging in the TEM. He further discussed the various detection modes, possibilities and theory of SEM,<ref>{{cite journal|last = von Ardenne|first = Manfred|year = 1938|title = Das Elektronen-Rastermikroskop. Theoretische Grundlagen|journal = Zeitschrift für Physik|volume = 109
|issue = 9–10|pages = 553–572|language = de|doi = 10.1007/BF01341584|bibcode = 1938ZPhy..109..553V | s2cid=117900835 }}</ref> together with the construction of the [[:File:First Scanning Electron Microscope with high resolution from Manfred von Ardenne 1937.jpg|first high resolution SEM]].<ref>{{cite journal|last = von Ardenne|first = Manfred|year =1938
|title = Das Elektronen-Rastermikroskop. Praktische Ausführung|journal = Zeitschrift für Technische Physik|volume = 19|pages = 407–416|language = de}}</ref> Further work was reported by [[Vladimir K. Zworykin|Zworykin's]] group,<ref>Zworykin VA, Hillier J, Snyder RL (1942) A scanning electron microscope. ASTM Bull 117, 15–23.</ref> followed by the [[Trinity College, Cambridge|Cambridge]] groups in the 1950s and early 1960s<ref>{{cite journal|author=McMullan, D.|year=1953|title= An improved scanning electron microscope for opaque specimens|doi=10.1049/pi-2.1953.0095|volume=100|issue=75|journal=Proceedings of the IEE - Part II: Power Engineering|pages=245–256}}</ref><ref>Oatley CW, Nixon WC, [[R. Fabian Pease|Pease RFW]] (1965) Scanning electron microscopy. Adv Electronics Electron Phys 21, 181–247.</ref><ref>{{cite journal|last1=Smith |first1=KCA|last2=Oatley|first2=CW |title=The scanning electron microscope and its fields of application|doi=10.1088/0508-3443/6/11/304|year=1955|journal=British Journal of Applied Physics|volume=6|issue=11|pages=391–399|bibcode = 1955BJAP....6..391S }}</ref><ref>Wells OC (1957) The construction of a scanning electron microscope and its application to the study of fibres. PhD Dissertation, Cambridge University.</ref> headed by [[Charles Oatley]], all of which finally led to the marketing of the first commercial instrument by [[Cambridge Scientific Instrument Company]] as the "Stereoscan" in 1965, which was delivered to [[DuPont]].