Editing MEMS (section)

== History ==

An early example of a MEMS device is the resonant-gate transistor, an adaptation of the [[MOSFET]], developed by Robert A. Wickstrom for [[Harvey C. Nathanson]] in 1965.<ref>{{cite journal|vauthors=Nathanson HC, Wickstrom RA|date=1965|title=A Resonant-Gate Silicon Surface Transistor with High-Q Band-Pass Properties|journal=[[Applied Physics Letters|Appl. Phys. Lett.]]|volume=7|issue=4|pages=84–86|doi=10.1063/1.1754323|bibcode=1965ApPhL...7...84N}}</ref> Another early example is the resonistor, an electromechanical monolithic [[resonator]] patented by Raymond J. Wilfinger between 1966 and 1971.<ref>{{Cite patent|country=US|number=3614677A|title=Electromechanical monolithic resonator|status=patent|pubdate=|gdate=Oct 1971|invent1=Wilfinger RJ|inventor1-first=|assign1=International Business Machines Corp|url=https://patents.google.com/patent/US3614677A/en}}</ref><ref>{{cite journal|vauthors=Wilfinger RJ, Bardell PH, Chhabra DS|date=1968|title=The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate|journal=[[IBM Journal of Research and Development|IBM J. Res. Dev.]]|volume=12|issue=1|pages=113–8|doi=10.1147/rd.121.0113}}</ref> During the 1970s to early 1980s, a number of MOSFET [[microsensor]]s were developed for measuring physical, chemical, biological and environmental parameters.<ref name="Bergveld">{{cite journal |last1=Bergveld |first1=Piet |author1-link=Piet Bergveld |title=The impact of MOSFET-based sensors |journal=Sensors and Actuators |date=October 1985 |volume=8 |issue=2 |pages=109–127 |doi=10.1016/0250-6874(85)87009-8 |bibcode=1985SeAc....8..109B |url=https://core.ac.uk/download/pdf/11473091.pdf |issn=0250-6874 |access-date=2019-10-16 |archive-date=2021-04-26 |archive-url=https://web.archive.org/web/20210426192332/https://core.ac.uk/download/pdf/11473091.pdf |url-status=dead }}</ref>

The term "MEMS" was introduced in 1986. S.C. Jacobsen (PI) and J.E. Wood (Co-PI) introduced the term "MEMS" by way of a proposal to [[DARPA]] (15 July 1986), titled "Micro Electro-Mechanical Systems (MEMS)", granted to the University of Utah. The term "MEMS" was presented by way of an invited talk by S.C. Jacobsen, titled "Micro Electro-Mechanical Systems (MEMS)", at the IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA Nov. 9–11, 1987. The term "MEMS" was published by way of a submitted paper by J.E. Wood, S.C. Jacobsen, and K.W. Grace, titled "SCOFSS: A Small Cantilevered Optical Fiber Servo System", in the IEEE Proceedings Micro Robots and Teleoperators Workshop, Hyannis, MA Nov. 9–11, 1987.<ref>IEEE Catalog no. 87TH0204-8, Library of Congress no. 87-82657.  Reprinted in "Micromechanics and MEMS: Classic and Seminal Papers to 1990" (ed. Wm. S. Trimmer, {{ISBN|0-7803-1085-3}}), pgs. 231–236.</ref> CMOS transistors have been manufactured on top of MEMS structures.<ref>{{cite web | url=https://www.eetimes.com/mems-transistor-integrated-on-cmos/ | title=MEMS transistor integrated on CMOS | date=6 December 2011 }}</ref>