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== Origin == [[Luminescence]] in a [[semiconductor]] results when an [[electron]] in the [[conduction band]] recombines with a [[Electron hole|hole]] in the valence band. The difference energy (band gap) of this transition can be emitted in form of a [[photon]]. The energy (color) of the photon, and the probability that a photon and not a [[phonon]] will be emitted, depends on the material, its purity, and the presence of defects. First, the electron has to be excited from the [[valence band]] into the [[conduction band]]. In cathodoluminescence, this occurs as the result of an impinging high energy electron beam onto a [[semiconductor]]. However, these primary electrons carry far too much energy to directly excite electrons. Instead, the inelastic scattering of the primary electrons in the crystal leads to the emission of [[secondary electrons]], [[Auger electrons]] and [[X-rays]], which in turn can scatter as well. Such a cascade of scattering events leads to up to 10<sup>3</sup> secondary electrons per incident electron.<ref>{{cite journal|author1=Mitsui, T |author2=Sekiguchi, T |author3=Fujita, D |author4=Koguchi, N. |s2cid=56031946|title=Comparison between electron beam and near-field light on the luminescence excitation of GaAs/AlGaAs semiconductor quantum dots|journal=Jpn. J. Appl. Phys.|volume=44|issue=4A|pages=1820β1824|year=2005|doi=10.1143/JJAP.44.1820|bibcode = 2005JaJAP..44.1820M }}</ref> These secondary electrons can excite valence electrons into the conduction band when they have a kinetic energy about three times the [[band gap]] energy of the material <math>(E_{kin}\approx 3 E_g)</math>.<ref>{{cite journal|first1=C. A.|last1=Klein|title=Bandgap dependence and related features of radiation ionization energies in semiconductors|journal=J. Appl. Phys.|volume=39|issue=4|pages=2029β2038|year=1968|doi=10.1063/1.1656484|bibcode = 1968JAP....39.2029K }}</ref> From there the electron recombines with a hole in the valence band and creates a photon. The excess energy is transferred to phonons and thus heats the lattice. One of the advantages of excitation with an electron beam is that the band gap energy of materials that are investigated is not limited by the energy of the incident light as in the case of [[photoluminescence]]. Therefore, in cathodoluminescence, the "semiconductor" examined can, in fact, be almost any non-metallic material. In terms of [[band structure]], classical semiconductors, insulators, ceramics, gemstones, minerals, and glasses can be treated the same way.
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